Ultra-high vacuum compatible sputter ion pump "Excel Pump"
40% size reduction! Achieves high efficiency with built-in baking heater and moisture retention cover.
The "Excel Pump" is a compact and lightweight vacuum pump. Based on an ion pump, it has been developed by improving the discharge characteristics in low-pressure regions, featuring pump elements and a built-in heater that enables efficient baking. Additionally, the incorporation of a NEG (non-evaporable getter) pump allows for the achievement of XHV. 【Features】 ■ High exhaust capacity in UHV and XHV regions ■ Realization of high-efficiency baking ■ Compact and lightweight ■ Compatible with clean rooms *For more details, please refer to the PDF document or feel free to contact us.
- Company：キヤノンアネルバ 栗木本社
- Price：Other
